Oriented growth of LiNbO3 thin films for SAW properties

Materials Science Forum

Volumn 408-412, Issue II, 2002, Pages 1573-1578

  Bornand, V ^a   Huet, I ^a   Chateigner, D ^b   Papet, Ph ^c  

^a UNIVERSITÉ DE MONTPELLIER   (France)

^b LABORATOIRE CRISMAT   (France)

^c NONE

Author keywords

2 Step Growth; Al2O3 Substrate; LiNbO3; Lithium Niobate; Oriented Thin Films; Pyrosol; RF Sputtering; SAW Device; Si Substrates; Texture

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ATOMIC FORCE MICROSCOPY; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; GRAIN BOUNDARIES; GRAIN GROWTH; LITHIUM NIOBATE; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SPUTTER DEPOSITION; STOICHIOMETRY; TEXTURES; X RAY DIFFRACTION ANALYSIS;

GROWTH ORIENTATION;

THIN FILMS;

EID: 0037004728     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

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