A finite element study of cross coupling in 1-D capacitive micromachined ultrasonic transducer arrays

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2002, Pages 1059-1062

  Caronti, Alessandro ^a   Carotenuto, Riccardo ^a   Caliano, Giosué ^a   Pappalardo, Massimo ^a   Cianci, Elena ^b  

^a ROMA TRE UNIVERSITY   (Italy)

^b IFN CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTERFACES (MATERIALS); MATHEMATICAL MODELS; MEDICAL IMAGING; PIEZOELECTRIC MATERIALS; SILICON WAFERS; ULTRASONIC IMAGING; ULTRASONIC PROPAGATION;

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; CROSS COUPLING ANALYSIS;

ULTRASONIC TRANSDUCERS;

EID: 0036992341     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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3. A. R. Selfridge, G. S. Kino, and B. T. Khuri-Yakub, "A theory for the radiation pattern of a narrow-strip acoustic transducer," Appl. Phys. Lett., Vol. 37, no. 1, pp. 35-36, 1980.
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5. D. H. Turnbull and F. S. Foster, "Fabrication and characterization of transducer elements in two-dimensional arrays for medical ultrasound imaging," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., Vol. 39, no. 4, pp. 464-474, 1992.
6. W. Friedrich, H. Kaarmann, and R., Lerch "Finite element modeling of acoustic radiation from piezoelectric phased array antennas," in Proc. Ultrason. Symp., pp. 763-767, 1990.
7. W. Qi and W. Cao, "Finite element study on 1-D array transducer design," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., Vol. 47, no. 4, pp. 949-955, 2002.