Optimizing indium tin oxide thin films with bipolar d.c.-pulsed magnetron sputtering for electrochromic device applications

Journal of Materials Science: Materials in Electronics

Volumn 13, Issue 12, 2002, Pages 751-756

  Lee, W J ^a   Fang, Y K ^a   Ho, J J ^b   Chen, C Y ^b   Chen, S F ^b   Tsai, R Y ^c   Huang, D ^c   Ho, F C ^c  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b FORTUNE INSTITUTE OF TECHNOLOGY   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTROCHROMIC DEVICES; MAGNETRON SPUTTERING; MIXTURES; OPTIMIZATION; OXYGEN; SURFACE ROUGHNESS; THIN FILMS;

GLASS SUBSTRATES; INDIUM TIN OXIDE THIN FILMS;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0036990221     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1021504414559     Document Type: Article

References (25)

1. J. L. Vossen, Phys. Thin Films 9 (1977) 1.
2. R. P. Howson and M. I. Ridge, Proc. SPIE 324 (1982) 16.
3. T. Karasawa and Y. Miyata, Thin Solid Film 223 (1993) 135.
4. T. Oyama, N. Hashimoto, J. Shimizu, Y. Akao, H. Kojima, K. Aikawa and K. Suzuki, J. Vac. Sci. Technol. A 10(4) (1992) 1682.
5. H. L. Hartnagel, A. L. Dawar, A. K. Jain and C. Jagadish, "Semiconducting Transparent Thin Films" (Institute of Physics, Bristol, 1995) Chap. 2, p. 85.
6. J. A. Doborwolski, F. C. Ho, D. Menagh, R. Simpson and A. Waldorf, Appl. Opt. 26 (1987) 5204.
7. R.-Y. Tsai, F.-C. Ho and M.-Y. Ho and M.-Y. Hua, Opt. Eng. 36 (1997) 2335.
8. S. B. Lee, J. C. Pincenti, A. Cocco and D. L. Naylor, J. Vac. Sci. Technol. A 11 (1993) 2742.
9. K. Carl, H. Schmitt and I. Friedrich, Thin Solid Films 295 (1997) 151.
10. W.-F. Wu and B.-S. Chiou, Appl. Surf. Sci. 68 (1993) 497.
11. David A. Glocker J. Vac. Sci. Technol. A 11 (1993) 2989.
12. S. Schiller, K. Goedicke, J. Reschke, V. Kirchhoff, S. Schneider and F. Midle, Surf. Coatings Technol. 61 (1993) 331.
13. J. Arakaki, R. Reyes, M. Horn and W. Estrada, Solar Energy Mater. Solar Cells 37 (1995) 33.
14. C. G. Granqvist, Solar Energy Mater. Solar Cells 32 (1994) 369.
15. Klaus Bange and Thomas Gambke, Adv. Mater. 2 (1990) 10.
16. R. B. Goldner, F. O. Arntz, G. Berera, T. E. Haas, G. Wei, K. K. Wong and P. C. Yu, Solid State Ionics 53-56 (1992)
17. R. B. Goldner, J. Vac. Sci. Technol. A 13(3) (1995) 1088.
18. R. B. Goldner, T. E. Haas, F. O. Arntz, S. Slaven, K. K. Wong, B. Wilkens, C. Shepard and W. Lanford, Appl. Phys. Lett. 62(14) (1993) 1699.
19. P. V. Ashrit, K. Benaissa, G. Bader, F. E. Girouard and Vo-Van Troung, Solid State Ionics 59 (1993) 47.
20. H. S. Witham, P. Chindaudom, I. An, R. W. Collins, R. Messier and K. Vedam, J. Vac. Sci. Technol. A 11(4) (1993) 1881.
21. R. Swanepoel, J. Phys. E: Sci. Instrum. 16 (1983) 1214.
22. T. Karasawa and Y. Miyata, Thin Solid Film. 223 (1993) 135.
23. S. Honda, A. Tsujimoto, M. Watamori and K. Oura, J. Vac. Sci. Technol. A 13 (1995) 1100.
24. W. J. Lee, Y. K. Fang, J.-J. Ho, W. T. Hsieh, S. F. Ting, Daoyang Huang and Fang C. Ho, J. Electron. Mater. 29(2) (2000) 183.
25. J. S. E. M. Svensson and C. G. Granqvist, Appl. Phys. Lett. 49 (1986) p. 1556.