Fabrication of uniformly redundant arrays and Young's slits for coherence measurements in x-rays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4783, Issue , 2002, Pages 165-175

  Moldovan, Nicolaie ^a   Paterson, David ^a   Divan, Ralu ^a   Mancini, Derrick C ^a   Lin, John ^b   Nugent, Keith A ^b   McNulty, Ian ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF MELBOURNE   (Australia)

Author keywords

Coherence; Diffraction; Electroforming; Lithography; Microfabrication; Synchrotron radiation; X rays

Indexed keywords

COHERENT LIGHT; DIFFRACTION; ELECTROFORMING; LITHOGRAPHY; OPTICAL VARIABLES MEASUREMENT; PHOTORESISTS; SYNCHROTRON RADIATION;

ADVANCED PHOTON SOURCE; COHERENCE MEASUREMENTS; MICROFABRICATION; RADIATION BEAMLINES; UNIFORMLY REDUNDANT ARRAYS;

X RAY OPTICS;

EID: 0036987403     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.451017     Document Type: Conference Paper

References (7)

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