Defect clustering and classification for semiconductor devices

Midwest Symposium on Circuits and Systems

Volumn 2, Issue , 2002, Pages

  Kundu, Bijoy ^a   Preston White Jr , K ^a   Mastrangelo, Christina ^a  

^a University of Virginia   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CRACK PROPAGATION; CRYSTAL DEFECTS; ELECTRONIC EQUIPMENT TESTING; IMPURITIES; PATTERN MATCHING;

HOUGH TRANSFORMATION (HT);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0036979446     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Glenn W. Milligan and Martha Cooper, "An Examination of procedures for determining the number of clusters in a data set", Psychometrica, Vol 50, 159-179, (1985).
2. T. Calinski and J. Harabasz, "A dendrite method for cluster analysis", Communications in Statistics, vol 3: 1-27, (1974)
3. Donald Brown and Louise Gunderson, "Using clustering to discover the preferences of computer criminals", IEEE Transactions on SMC- Part A: Systems and Humans, Vol 31, (2001).
4. Bijoy Kundu, M.S Thesis, University of Virginia, (2002).
5. Sean P. Cunningham and Scott Mackinnon, "Statistical Methods for Visual Defect Metrology", IEEE Transactions on Semiconductor Manufacturing, Vol. 11, 48-53, (1998).