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Volumn 256, Issue 1, 2002, Pages 143-152
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Stabilization of high ionic strength slurries using surfactant mixtures: Molecular factors that determine optimal stability
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Author keywords
Chemical mechanical polishing (CMP); Dispersion stability; Mixed surfactant synergism; Stabilization model.
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Indexed keywords
ADSORPTION;
CHEMICAL MECHANICAL POLISHING;
COAGULATION;
HYDROPHILICITY;
HYDROPHOBICITY;
IONIC STRENGTH;
SLURRIES;
SURFACE ACTIVE AGENTS;
DESTABILIZATION;
COLLOIDS;
ALUMINUM OXIDE;
COPPER;
IONIC SURFACTANT;
NONIONIC SURFACTANT;
TUNGSTEN;
ADSORPTION;
ARTICLE;
CONCENTRATION RESPONSE;
HYDROPHOBICITY;
IONIC STRENGTH;
PARTICLE SIZE;
PRIORITY JOURNAL;
SEDIMENTATION;
SURFACE PROPERTY;
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EID: 0036973182
PISSN: 00219797
EISSN: None
Source Type: Journal
DOI: 10.1006/jcis.2002.8648 Document Type: Article |
Times cited : (64)
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References (26)
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