|
Volumn 56, Issue 12, 2002, Pages 1621-1625
|
Absorptivity of carbon dioxide and molecular oxygen at 193 nm at high temperatures up to 1600°C
|
Author keywords
ArF laser absorption; Carbon dioxide; High temperature; Oxygen; UV absorptivity
|
Indexed keywords
CARBON DIOXIDE;
EXCIMER LASERS;
HIGH TEMPERATURE EFFECTS;
LIGHT SOURCES;
ABSORPTIVITY;
MOLECULAR OXYGEN;
GAS ABSORPTION;
|
EID: 0036971592
PISSN: 00037028
EISSN: None
Source Type: Journal
DOI: 10.1366/000370202321116110 Document Type: Article |
Times cited : (1)
|
References (22)
|