Manufacturing Execution System (mes) for semiconductor manufacturing

Proceedings of the IEEE International Conference on Systems, Man and Cybernetics

Volumn 4, Issue , 2002, Pages 7-11

  Chung, Sheng Luen ^a   Jeng, MuDer ^b  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

Author keywords

Relational Database design and implementation; Semiconductor Manufacturing, Manufacturing Execution System (MES); Web based GUI; WIP Tracking

Indexed keywords

COMPUTER ARCHITECTURE; CONTROL SYSTEMS; GRAPHICAL USER INTERFACES; INTERNET; RELATIONAL DATABASE SYSTEMS; SERVERS; WORLD WIDE WEB;

MANUFACTURING EXECUTION SYSTEMS (MES);

SEMICONDUCTOR MATERIALS;

EID: 0036966420     PISSN: 08843627     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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