Three-dimensional imaging of diffusion volumes in silicon circuits by use of the two-photon optical-beam-induced current effect

Optics and Photonics News

Volumn 13, Issue 12, 2002, Pages 17-

  Reid, D T ^a   Ramsay, E ^a   Wilsher, K ^b  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

^b NPTest   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; DOPING (ADDITIVES); INTEGRATED CIRCUITS; LASER BEAMS; PHOTOCURRENTS; PHOTONS;

FEMTOSECOND LASERS;

IMAGING TECHNIQUES;

EID: 0036964147     PISSN: 10476938     EISSN: None     Source Type: Trade Journal    
DOI: 10.1364/opn.13.12.000017     Document Type: Article

References (2)

1. C. Xu and W. Denk, Appl. Phys. Lett. 71, 2578-80 (1997).
2. E. Ramsay, D.T. Reid and K. Wilsher, Appl. Phys. lett. 81, 7-9 (2002).