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Volumn 194, Issue 2 SPEC., 2002, Pages 550-553
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Effect of the nucleation layer on stress during cantilever epitaxy of GaN on Si (111)
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM NITRIDE;
CARRIER CONCENTRATION;
CRYSTAL STRUCTURE;
CRYSTALLOGRAPHY;
DISLOCATIONS (CRYSTALS);
EPITAXIAL GROWTH;
NUCLEATION;
SEMICONDUCTING ALUMINUM COMPOUNDS;
SEMICONDUCTING FILMS;
SEMICONDUCTING SILICON;
STRESSES;
X RAY DIFFRACTION ANALYSIS;
CANTILEVER EPITAXY;
MESA;
GALLIUM NITRIDE;
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EID: 0036960016
PISSN: 00318965
EISSN: None
Source Type: Journal
DOI: 10.1002/1521-396X(200212)194:2<550::AID-PSSA550>3.0.CO;2-R Document Type: Article |
Times cited : (13)
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References (7)
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