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Volumn 18, Issue 12, 2002, Pages 1395-1398
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Round robin test for depth profiling of SiO2/Si multilayer
a
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Author keywords
[No Author keywords available]
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Indexed keywords
SILICA;
ROUND ROBIN TEST;
DEPTH PROFILING;
SILICON;
SILICON DIOXIDE;
ACCELERATION;
APPARATUS;
ARTICLE;
AUGER ELECTRON SPECTROSCOPY;
CHEMICAL ANALYSIS;
DEPTH PERCEPTION;
ENERGY;
INTERMETHOD COMPARISON;
MEASUREMENT;
SURFACE PROPERTY;
X RAY PHOTOELECTRON SPECTROSCOPY;
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EID: 0036957524
PISSN: 09106340
EISSN: None
Source Type: Journal
DOI: 10.2116/analsci.18.1395 Document Type: Article |
Times cited : (1)
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References (6)
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