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Volumn 18, Issue 12, 2002, Pages 1395-1398

Round robin test for depth profiling of SiO2/Si multilayer

Author keywords

[No Author keywords available]

Indexed keywords

SILICA;

EID: 0036957524     PISSN: 09106340     EISSN: None     Source Type: Journal    
DOI: 10.2116/analsci.18.1395     Document Type: Article
Times cited : (1)

References (6)
  • 1
    • 85036698167 scopus 로고    scopus 로고
    • Optimization using layered systems as reference materials refer to the standard which includes many references concerning depth profiling
    • JIS K 0146:2002 (ISO14606:2000): Surface chemical analysis - Sputter depth profiling. Optimization using layered systems as reference materials; refer to the standard, which includes many references concerning depth profiling.
    • (2002) Surface Chemical Analysis - Sputter Depth Profiling
  • 2
    • 85036723164 scopus 로고    scopus 로고
    • GaAs/AlAs Superlattice Reference Material (NIMC CRM 5201-a); regarding the distribution of the reference material
    • AIST Today, Vol. 3, GaAs/AlAs Superlattice Reference Material (NIMC CRM 5201-a); regarding the distribution of the reference material, refer to this website: http://www.sasj.gr.jp/
    • AIST Today , vol.3
  • 3
    • 85036710031 scopus 로고    scopus 로고
    • "Bunseki Bunka Kai" is one of the sub-committee of the committee for intellectual infrastructures in the Council of Promotion for Industrial Technology Collaboration. Public testing and research organizations and AIST participate in the "Bunseki Bunka Kai" to exchange information concerning common issues associated with chemical analysis. The first activity of the "Bunseki Bunka Kai" dates back to 1957. This sub committee's website: http://www.nrlm.go.jp/section/bb_kai/.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.