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Volumn , Issue , 2002, Pages 266-269

Carrier density imaging (CDI): A spatially resolved lifetime measurement suitable for in-line process-control

Author keywords

[No Author keywords available]

Indexed keywords

IMAGING SYSTEMS; LIGHT ABSORPTION; PROCESS CONTROL; SILICON WAFERS; SPATIAL VARIABLES MEASUREMENT; SURFACE TREATMENT;

EID: 0036956794     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (14)

References (10)
  • 4
    • 0012569512 scopus 로고    scopus 로고
    • AEG Infrarot-Module-GmbH, Heilbronn
    • W. Cabanski, AEG Infrarot-Module-GmbH, Heilbronn (1999)
    • (1999)
    • Cabanski, W.1
  • 8
    • 0012573641 scopus 로고    scopus 로고
    • MPI Halle, Germany, personal communication
    • O. Breitenstein, MPI Halle, Germany, personal communication. (2002)
    • (2002)
    • Breitenstein, O.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.