Plasma species analysis for in situ assessment of surface treatments

Surface Engineering

Volumn 18, Issue 2, 2002, Pages 133-139

  Cleugh, D ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION SPECTROSCOPY; GLOW DISCHARGES; ION IMPLANTATION; LIGHT EMISSION; MICROHARDNESS; NITRIDING; OPTICAL MICROSCOPY; PLASMA APPLICATIONS; X RAY DIFFRACTION ANALYSIS;

OPTICAL EMISSION SPECTROSCOPY; PLASMA PHASE SPECIES;

SURFACE TREATMENT;

EID: 0036950845     PISSN: 02670844     EISSN: None     Source Type: Journal    
DOI: 10.1179/026708402225002802     Document Type: Article

References (14)

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