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Volumn 716, Issue , 2002, Pages 189-195
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Composite X-ray waveguide-resonator as a background for the new generation of the material testing equipment for films on Si substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
COATINGS;
DIELECTRIC MATERIALS;
ELECTROMAGNETIC WAVE REFLECTION;
MATERIALS TESTING;
OPTICAL RESONATORS;
OPTICAL WAVEGUIDES;
SEMICONDUCTING SILICON;
SUBSTRATES;
THIN FILMS;
COMPOSITE PLANAR X RAY WAVEGUIDE RESONATOR;
ELECTROMAGNETIC RADIATION BEAM;
X RAY BEAM PENETRATION;
X RAY STANDING WAVE;
X RAY OPTICS;
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EID: 0036950840
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-716-b4.15 Document Type: Conference Paper |
Times cited : (13)
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References (12)
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