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Volumn 728, Issue , 2002, Pages 115-120
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Synthesis and characterization of self-assembled piezoelectric ZnO nanostructures and integration with Si processing
a b b c a |
Author keywords
[No Author keywords available]
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Indexed keywords
BLOCK COPOLYMERS;
CHEMICAL BONDS;
CRYSTAL GROWTH;
NANOSTRUCTURED MATERIALS;
PARTICLE SIZE ANALYSIS;
PHOTOLITHOGRAPHY;
PIEZOELECTRIC MATERIALS;
RING OPENING POLYMERIZATION;
SELF ASSEMBLY;
SYNTHESIS (CHEMICAL);
TRANSMISSION ELECTRON MICROSCOPY;
X RAY PHOTOELECTRON SPECTROSCOPY;
NORBORNENE;
NORBORNENE DICARBOXYLIC ACID BLOCKS;
WET CHEMICAL PROCESING;
ZINC OXIDE;
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EID: 0036950587
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-728-s3.32 Document Type: Conference Paper |
Times cited : (1)
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References (6)
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