Effect of proton irradiation and subsequent thermal annealing on the characteristics of thin-film silicon solar cells and microcrystalline silicon layers

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2002, Pages 974-977

  Kuendig, J ^a   Shah, A ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLINE MATERIALS; ELECTRONIC PROPERTIES; GLOW DISCHARGES; HETEROJUNCTIONS; OPTICAL PROPERTIES; PROTON IRRADIATION; THIN FILMS;

MICROCRYSTALLINE SILICON LAYERS; THIN FILM SILICON SOLAR CELLS; VERY HIGH FREQUENCY GLOW DISCHARGE;

SILICON SOLAR CELLS;

EID: 0036948596     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. J. Kuendig et al., "Effect of proton irradiation on the characteristics of different types of thin-film silicon solar cells", 16th EPVSEC, 2000, pp. 986-989
2. N. Wyrsch et al., "Development of inverted micromorph solar cells", 2nd WCPEC, 1998, pp. 467-471
3. J. Meier et al., "Microcrystalline and micromorph thin-film silicon solar cells", 2nd WCPEC, 1998, pp. 375-380
4. J. Meier et al., "Microcrystalline/micromorph silicon thin-film solar cells prepared by the VHF-GD technique", Sol. Energy Mater. Sol. Cells, 66, 2001, pp. 73-84
5. H. Curtins, N. Wyrsch, A. Shah, "High rate deposition of amorphous hydrogenated silicon: effect of plasma excitation frequency", Electr. Lett. 23, 1987, pp. 228-230
6. N. Beck et al., "Mobility lifetime product - a Tool for Correlating a-Si:H Film Properties and Solar Cells Performances", J. Appl. Phys. 79, 1996, pp. 9361-9368