Polymeric integrated circuits: Fabrication and first characterisation

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2002, Pages 293-296

  De Leeuw, D M ^a   Gelinck, G H ^a   Geuns, T C T ^a   Van Veenendaal, E ^a   Cantatore, E ^a   Huisman, B H ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; FABRICATION; FIELD EFFECT TRANSISTORS; LITHOGRAPHY; LOGIC GATES; PHOTOCHEMICAL REACTIONS; REDUCTION; SILICON; SPIN COATING; THIN FILMS;

POLYMERIC INTEGRATED CIRCUITS;

INTEGRATED CIRCUITS;

EID: 0036932276     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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3. F.J. Touwslager, N.P. Willard and D.M. de Leeuw, submitted.
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