Fluorine diffusion: Models and experiments

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2002, Pages 883-886

  Robison, R R ^a   Law, M E ^a  

^a UNIVERSITY OF FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIFFUSION IN SOLIDS; FLUORINE; ION IMPLANTATION; SEMICONDUCTING BORON; SEMICONDUCTOR JUNCTIONS; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY;

TIME DEPENDENT DIFFUSION;

SILICON WAFERS;

EID: 0036927925     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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3. Lahir S. Adam, PhD Thesis, University of Florida, Gainesville FL, 2001.
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7. FLOOPS Manual, University of Florida, 2000 Release.
8. UT_MARLOWE version 5.0, manual, University of Texas, Austin Texas, 2000.