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Volumn 59, Issue 6, 2002, Pages 997-1006
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Novel matching lens and spherical ionizer for a cesium sputter ion source
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Author keywords
Beam optics; Ion source; Space charge
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Indexed keywords
ABERRATIONS;
CESIUM;
ELECTRIC CURRENTS;
ELECTRIC POTENTIAL;
ELECTRIC SPACE CHARGE;
ION SOURCES;
LENSES;
PARTICLE ACCELERATOR ACCESSORIES;
PARTICLE BEAM EXTRACTION;
PARTICLE BEAMS;
PARTICLE OPTICS;
VELOCITY;
SPHERICAL IONIZERS;
SPUTTERING;
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EID: 0036908597
PISSN: 03044289
EISSN: None
Source Type: Journal
DOI: 10.1007/s12043-002-0149-6 Document Type: Conference Paper |
Times cited : (13)
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References (2)
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