Cryogenic cleavage used in gold substrate production

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 6, 2002, Pages 2265-2270

  Mazurkiewicz, Jakub ^a,c   Mearns, Freya J ^a,b   Losic, Dusan ^a   Weeks, Laura ^a   Waclawik, Eric R ^a   Rogers, Craig T ^a,d   Shapter, Joseph G ^a  

^a FLINDERS UNIVERSITY   (Australia)

^b UNIVERSITY OF NEW SOUTH WALES   (Australia)

^c UNIVERSITY OF WOLLONGONG   (Australia)

^d Caltex Refineries (NSW) Pty Ltd   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CRYOGENICS; EPITAXIAL GROWTH; GLUES; MICA; NITROGEN; POLYESTERS; RELIABILITY; SCANNING; SEPARATION; SURFACE STRUCTURE;

CRYOGENIC CLEAVAGE; DIFFERENTIAL CONTRACTION; SCANNING PROBE;

GOLD;

EID: 0036883078     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1518968     Document Type: Article

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