Experimental study on infrared film of antireflective amorphous carbon on silicon

Guangxue Xuebao/Acta Optica Sinica

Volumn 22, Issue 11, 2002, Pages 1296-1299

  Yang, Yimin ^a   Guo, Jian ^a   Yang, Guowei ^a   Cai, Mengqiu ^a  

^a XIANGTAN UNIVERSITY   (China)

Author keywords

Amorphic carbon film; Infrared transmittance increasing; Laser ablating

Indexed keywords

ABLATION; CARBON; FABRICATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; RAMAN SCATTERING; SURFACE TOPOGRAPHY;

AMORPHIC CARBON FILM; INFRARED TRANSMITTANCE INCREASING; LASER ABLATING;

AMORPHOUS FILMS;

EID: 0036880249     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

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