A quasianalytic kinetic model for nonequilibrium C2H2(1%)/H2/Ar RF plasmas of interest in nanocrystalline diamond growth

Plasma Sources Science and Technology

Volumn 11, Issue 4, 2002, Pages 498-512

  Gordillo Vazquez F J ^a   Albella, J M ^b  

^a INSTITUTO DE ÓPTICA   (Spain)

^b INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CRYSTAL GROWTH; DIAMONDS; PLASMA APPLICATIONS; REACTION KINETICS;

ELECTRON ENERGY;

NANOSTRUCTURED MATERIALS;

EID: 0036860133     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/11/4/317     Document Type: Article

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