ECR ion source based low energy ion beam facility

Pramana - Journal of Physics

Volumn 59, Issue 5, 2002, Pages 805-809

  Kumar, P ^a   Rodrigues, G ^a   Rao, U K ^a   Safvan, C P ^a   Kanjilal, D ^a   Roy, A ^a  

^a INTER UNIVERSITY ACCELERATOR CENTRE   (India)

Author keywords

Electron cyclotron resonance; Ion beam; Ion implantation; Ion source; Plasma

Indexed keywords

ATOMIC PHYSICS; ELECTRIC POTENTIAL; ELECTRON CYCLOTRON RESONANCE; ION BEAMS; ION IMPLANTATION; MOLECULAR PHYSICS; OPTICAL FIBERS; POSITIVE IONS; UHF DEVICES;

ULTRA HIGH FREQUENCY (UHF) TRANSMITTERS;

ION SOURCES;

EID: 0036851722     PISSN: 03044289     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12043-002-0094-4     Document Type: Conference Paper

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