Correlation between the improved stability and low temperature hydrogen effusion in hydrogenated amorphous silicon films grown from hydrogen dilution of silane

Solid State Communications

Volumn 124, Issue 8, 2002, Pages 289-292

  Yoon, Jong Hwan ^a  

^a Kangwon National University   (South Korea)

Author keywords

A. Semiconductors; A. Thin films; D. Electronic transport

Indexed keywords

CORRELATION METHODS; DECOMPOSITION; FILM GROWTH; HYDROGEN; HYDROGENATION; LOW TEMPERATURE OPERATIONS; PHOTOCONDUCTIVITY; STABILITY;

HYDROGEN EFFUSION;

AMORPHOUS SILICON;

EID: 0036849806     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1098(02)00502-1     Document Type: Article

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