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Volumn 161, Issue 1, 2002, Pages 11-19
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X-ray photoelectron spectroscopy study of phosphorus silicate glasses
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Author keywords
Etching rates; Phosphorus silicate glass; Rapid thermal annealing; X ray photoelectron spectroscopy
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Indexed keywords
ANNEALING;
CHEMICAL VAPOR DEPOSITION;
ETCHING;
PHASE TRANSITIONS;
SAMPLING;
THERMAL EFFECTS;
VACUUM;
PHOSPHORUS SILICATE GLASSES;
COATING TECHNIQUES;
GLASS;
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EID: 0036837558
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(02)00383-3 Document Type: Article |
Times cited : (4)
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References (27)
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