Pulsed UV-laser-induced chemistry of perfluoropolyether lubricant film

Applied Physics A: Materials Science and Processing

Volumn 75, Issue 5, 2002, Pages 633-636

  Zhu, L ^a   Liew, T ^a   Chong, T C ^a  

^a DATA STORAGE INSTITUTE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND LIKE CARBON FILMS; EVAPORATION; EXCIMER LASERS; LUBRICANTS; MOLECULAR STRUCTURE; PULSED LASER APPLICATIONS; SECONDARY ION MASS SPECTROMETRY; THICKNESS MEASUREMENT; ULTRAVIOLET RADIATION;

PERFLUOROPOLYETHER; PULSED ULTRAVIOLET LASER INDUCED CHEMISTRY;

FLUORINE CONTAINING POLYMERS;

EID: 0036833255     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390101188     Document Type: Article

References (8)