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Volumn 6, Issue 5, 2002, Pages 455-464
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Growth chemistry of amorphous silicon and amorphous silicon-germanium alloys
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Author keywords
[No Author keywords available]
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Indexed keywords
ALLOY;
CRYSTALLIZATION;
DEPOSITION;
GERMANIUM;
METALLURGY;
SILICON;
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EID: 0036820208
PISSN: 13590286
EISSN: None
Source Type: Journal
DOI: 10.1016/S1359-0286(02)00105-5 Document Type: Article |
Times cited : (14)
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References (79)
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