Replication of fluorinated polyimide film using quartz glass mold

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 41, Issue 10 A, 2002, Pages

  Shioda, Tsuyoshi ^a  

^a MITSUI CHEMICALS INC   (Japan)

Author keywords

Fluorinated polyimide; Quartz glass mold; Replication process; Water; Waveguide

Indexed keywords

ADHESIVES; GLASS; INTERFACES (MATERIALS); POLYIMIDES; QUARTZ;

QUARTZ GLASS MOLD;

PLASTIC FILMS;

EID: 0036815078     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.l1126     Document Type: Article

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