메뉴 건너뛰기




Volumn 41, Issue 28, 2002, Pages 5896-5904

Microscopic phase-shifting profilometry based on digital micromirror device technology

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0036794110     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.005896     Document Type: Article
Times cited : (86)

References (13)
  • 1
    • 0033895371 scopus 로고    scopus 로고
    • Overview of threedimensional shape measurement using optical methods
    • F. Chen, G. M. Brown, and M. Song, “Overview of threedimensional shape measurement using optical methods,” Opt. Eng. 39, 10-22 (2000).
    • (2000) Opt. Eng. , vol.39 , pp. 10-22
    • Chen, F.1    Brown, G.M.2    Song, M.3
  • 2
    • 0028546170 scopus 로고
    • Microshape and rough-surface analysis by fringe projection
    • K. Leonhardt, U. Droste, and H. J. Tiziani, “Microshape and rough-surface analysis by fringe projection,” Appl. Opt. 33, 7477-7488 (1994).
    • (1994) Appl. Opt. , vol.33 , pp. 7477-7488
    • Leonhardt, K.1    Droste, U.2    Tiziani, H.J.3
  • 3
    • 0001320465 scopus 로고    scopus 로고
    • Threedimensional topometry with stereo microscopes
    • R. Windecker, M. Fleischer, and H. J. Tiziani, “Threedimensional topometry with stereo microscopes,” Opt. Eng. 36, 3372-3377 (1997).
    • (1997) Opt. Eng. , vol.36 , pp. 3372-3377
    • Windecker, R.1    Fleischer, M.2    Tiziani, H.J.3
  • 4
    • 0027816551 scopus 로고
    • Current status of the digital micromirror device (DMD) for projection television applications
    • Institute of Electrical and Electronics Engineers, New York
    • L. J. Hornbeck, “Current status of the digital micromirror device (DMD) for projection television applications,” in International Electron Devices Technical Digest (Institute of Electrical and Electronics Engineers, New York, 1993), pp. 381-384.
    • (1993) International Electron Devices Technical Digest , pp. 381-384
    • Hornbeck, L.J.1
  • 5
    • 0027702636 scopus 로고
    • Mirrors on a chip
    • J. M. Younse, “Mirrors on a chip,” IEEE Spectrum 30(11), 27-31 (1993).
    • (1993) IEEE Spectrum , vol.30 , Issue.11 , pp. 27-31
    • Younse, J.M.1
  • 6
    • 0034460914 scopus 로고    scopus 로고
    • Digital fringe projection technique for high-speed 3D shape measurement
    • S. Zhang and W. Gao, eds., Proc. SPIE 4222
    • P. S. Huang, C. Zhang, and F. P. Chiang, “Digital fringe projection technique for high-speed 3D shape measurement,” in Process Control and Inspection for Industry, S. Zhang and W. Gao, eds., Proc. SPIE 4222, 54-60 (2000).
    • (2000) Process Control and Inspection for Industry , pp. 54-60
    • Huang, P.S.1    Zhang, C.2    Chiang, F.P.3
  • 7
    • 0011952007 scopus 로고    scopus 로고
    • Design of illumination and projection optics for projectors with single digital micromirror devices
    • C.-M. Chang and H.-P. D. Shieh, “Design of illumination and projection optics for projectors with single digital micromirror devices,” Appl. Opt. 39, 3202-3208 (2000).
    • (2000) Appl. Opt. , vol.39 , pp. 3202-3208
    • Chang, C.-M.1    Shieh, H.-P.D.2
  • 9
    • 84975597908 scopus 로고
    • Linear approximation for measurement errors in phase shifting interferometry
    • J. V. Wingerden, H. J. Frankena, and C. Smorenburg, “Linear approximation for measurement errors in phase shifting interferometry,” Appl. Opt. 30, 2718-2729 (1991).
    • (1991) Appl. Opt. , vol.30 , pp. 2718-2729
    • Wingerden, J.V.1    Frankena, H.J.2    Smorenburg, C.3
  • 10
    • 0033734653 scopus 로고    scopus 로고
    • Phase-shifting interferometry: Minimization of systematic errors
    • P. Hariharan, “Phase-shifting interferometry: minimization of systematic errors,” Opt. Eng. 39, 967-969 (2000).
    • (2000) Opt. Eng. , vol.39 , pp. 967-969
    • Hariharan, P.1
  • 12
    • 0021494190 scopus 로고
    • Automated phasemeasuring profilometry of 3-D diffuse objects
    • V. Srinivasan, H.-C. Liu, and M. Halioua, “Automated phasemeasuring profilometry of 3-D diffuse objects,” Appl. Opt. 23, 3105-3108 (1984).
    • (1984) Appl. Opt. , vol.23 , pp. 3105-3108
    • Srinivasan, V.1    Liu, H.-C.2    Halioua, M.3
  • 13
    • 0020919219 scopus 로고
    • Fourier transform profilometry for the automatic measurement of 3-D object shapes
    • M. Takeda and K. Mutoh, “Fourier transform profilometry for the automatic measurement of 3-D object shapes,” Appl. Opt. 22, 3977-3982 (1983).
    • (1983) Appl. Opt , vol.22 , pp. 3977-3982
    • Takeda, M.1    Mutoh, K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.