Ball tip-stylus tilt correction for a stylus profilometer

Precision Engineering

Volumn 26, Issue 4, 2002, Pages 405-411

  Clark, Stephan R ^a   Greivenkamp, John E ^b  

^a AGILENT TECHNOLOGIES   (United States)

^b UNIVERSITY OF ARIZONA   (United States)

Author keywords

Alignment error correction; Ball tip stylus tilt error; Coordinate measurement machine

Indexed keywords

ALIGNMENT; COORDINATE MEASURING MACHINES; ERROR ANALYSIS; PRECISION ENGINEERING;

STYLUS PROFILOMETERS;

PROFILOMETRY;

EID: 0036776540     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(02)00118-6     Document Type: Article

References (7)

1. Touch probe radius compensation for coordinate measurement using kriging interpolation
2. Frequency response characteristics of a mechanical surface profilometer
3. Qualification of the profilometer
4. Algorithms to deconvolve stylus geometry from surface profile measurements
5. Optical reference profilometry
6. Phase shifting interferometry