A high-resolution high-frequency monolithic top-shooting microinjector free of satellite drops - Part II: Fabrication, implementation, and characterization

Journal of Microelectromechanical Systems

Volumn 11, Issue 5, 2002, Pages 437-447

  Tseng, Fan Gang ^a,b   Kim, Chang Jin ^a   Ho, Chih Ming ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Inkjet printing; Micro injector; Monolithic print head; Satellite droplet; Thermal bubble jet

Indexed keywords

MICROELECTRONIC PROCESSING; MICROMACHINING; NOZZLES; OPTIMIZATION; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; VALVES (MECHANICAL);

BUBBLE CHECK VALVE; INKJET PRINTING; MICROINJECTOR; MONOLITHIC PRINTHEAD; SATELLITE DROPLET; TOP SHOOTING INKJETS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036772739     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.802901     Document Type: Article

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