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Volumn 29, Issue 9, 2002, Pages 795-800

Rigorous coupled-wave analysis of a new one-dimensional deep sub-wavelength grating

Author keywords

One dimensional deep sub wavelength grating; Polarization; Rigorous coupled wave analysis (RCWA)

Indexed keywords

FABRICATION; FILMS; MULTILAYERS; ONE DIMENSIONAL; POLARIZATION;

EID: 0036761358     PISSN: 02587025     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (16)

References (8)
  • 1
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    • Rigorous coupled-wave analysis of planar-grating diffraction
    • M.G. Moharam, T.K. Gaylord. Rigorous coupled-wave analysis of planar-grating diffraction [J]. J. Opt. Soc. Am., 1981, 71(7): 811-818.
    • (1981) J. Opt. Soc. Am. , vol.71 , Issue.7 , pp. 811-818
    • Moharam, M.G.1    Gaylord, T.K.2
  • 2
    • 0020735441 scopus 로고
    • Rigorous coupled-wave analysis of grating diffraction - E-mode polarization and losses
    • M.G. Moharam, T.K. Gaylord. Rigorous coupled-wave analysis of grating diffraction - E-mode polarization and losses [J]. J. Opt. Soc. Am, 1983, 73(4): 451-455.
    • (1983) J. Opt. Soc. Am. , vol.73 , Issue.4 , pp. 451-455
    • Moharam, M.G.1    Gaylord, T.K.2
  • 3
    • 0028441648 scopus 로고
    • Homogeneous layer models for high-spatial-frequency dielectric surface-relief gratings: Conical diffraction and antireflection designs
    • D.L. Brundrett, E.N. Glytsis, T.K. Gaylord. Homogeneous layer models for high-spatial-frequency dielectric surface-relief gratings: conical diffraction and antireflection designs [J]. Appl. Opt., 1994, 33(13): 2695-2706.
    • (1994) Appl. Opt. , vol.33 , Issue.13 , pp. 2695-2706
    • Brundrett, D.L.1    Glytsis, E.N.2    Gaylord, T.K.3
  • 4
    • 84975564537 scopus 로고
    • Rigorous coupled-wave analysis of metallic surface-relief gratings
    • M.G. Moharam, T.K. Gaylord. Rigorous coupled-wave analysis of metallic surface-relief gratings [J]. J. Opt. Soc. Am. A, 1986, 3(11): 1780-1781.
    • (1986) J. Opt. Soc. Am. A , vol.3 , Issue.11 , pp. 1780-1781
    • Moharam, M.G.1    Gaylord, T.K.2
  • 5
    • 84975661809 scopus 로고
    • High-spatial-frequency binary and multilevel stairstep gratings: Polarization selective mirrors and broadb and antireflection surfaces
    • E.N. Glytsis, T.K. Gaylord. High-spatial-frequency binary and multilevel stairstep gratings: polarization selective mirrors and broadband antireflection surfaces [J]. Appl. Opt., 1992, 31(22): 4459-4470.
    • (1992) Appl. Opt. , vol.31 , Issue.22 , pp. 4459-4470
    • Glytsis, E.N.1    Gaylord, T.K.2
  • 6
    • 0020824090 scopus 로고
    • Three-dimensional coupled-wave analysis of planar-grating diffraction
    • M.G. Moharam, J.K. Gaylord. Three-dimensional coupled-wave analysis of planar-grating diffraction [J]. J. Opt. Soc. Am., 1983, 73(9): 1105-1112.
    • (1983) J. Opt. Soc. Am. , vol.73 , Issue.9 , pp. 1105-1112
    • Moharam, M.G.1    Gaylord, J.K.2
  • 7
    • 0029307028 scopus 로고
    • Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings
    • M. G. Moharam, E.B. Grann, D.A. Pommet. Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings [J]. J. Opt. Soc. Am. A, 1995, 12(5): 1068-1076.
    • (1995) J. Opt. Soc. Am. A , vol.12 , Issue.5 , pp. 1068-1076
    • Moharam, M.G.1    Grann, E.B.2    Pommet, D.A.3
  • 8
    • 0004119082 scopus 로고    scopus 로고
    • Beijing: National Defence Industry, Chinese source
    • Jin Guofan, Yan Yingbai, Wu Mingxian. Binary Optics [M]. Beijing: National Defence Industry, 1998. 298 (in Chinese)
    • (1998) Binary Optics , pp. 298
    • Jin, G.1    Yan, Y.2    Wu, M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.