Third generation multi-purpose plasma immersion ion implanter for surface modification of materials

He Jishu/Nuclear Techniques

Volumn 25, Issue 9, 2002, Pages 690-

  Tang, Baoyin ^a   Wang, Langping ^a   Wang, Xiaofeng ^a   Gan, Kongyin ^a   Wang, Songyan ^a   Chu, Paul K ^a   Huang, Nan ^a   Sun, Hong ^a  

^a NONE

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EID: 0036758896     PISSN: 02533219     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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