Excitation equilibria in an argon surface-wave-produced and -sustained plasmas

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 9, 2002, Pages 5659-5667

  Lao, C ^a   Cotrino, J ^a   Palmero, A ^a   Gamero, A ^b  

^a UNIVERSITY OF CÓRDOBA   (Spain)

^b UNIVERSITY OF SEVILLE   (Spain)

Author keywords

Argon excited states; Low pressure plasma; Microwave plasma; Surface wave plasma

Indexed keywords

ABSORPTION; ARGON; EMISSION SPECTROSCOPY; IONIZATION; THERMODYNAMICS;

EXCITATION EQUILIBRIA;

PLASMAS;

EID: 0036757787     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.5659     Document Type: Article

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