A transmission electron microscope study of microstructural development in magnetron-sputtered MoSi2 thin films

Intermetallics

Volumn 10, Issue 9, 2002, Pages 829-839

  Wang, X Y ^a   Chang, I T H ^a   Aindow, M ^b  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

^b UNIVERSITY OF CONNECTICUT   (United States)

Author keywords

A. Molybdenum silicides; B. Phase transformations; C. Thin films

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CRYSTAL ORIENTATION; CRYSTALLIZATION; GRAIN SIZE AND SHAPE; GROWTH (MATERIALS); MAGNETRON SPUTTERING; METALLOGRAPHIC MICROSTRUCTURE; MOLYBDENUM COMPOUNDS; PHASE TRANSITIONS; TRANSMISSION ELECTRON MICROSCOPY;

FREE-STANDING FILMS;

THIN FILMS;

EID: 0036743298     PISSN: 09669795     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0966-9795(02)00035-3     Document Type: Article

References (32)

1. Vasudevan A.K., Petrovic J.J. Mater. Sci. Eng. A155:1992;1-17.
2. Kircher T.A., Courtright E.L. Mater. Sci. Eng. A155:1992;67-74.
3. Jeng Y.L., Lavernia E.J. J. Mater. Sci. 29:1994;2557-2571.
4. Maloy S.A., Mitchell T.E., Heuer A.H. Acta Metall. 43:1995;657-668.
5. Ito K., Yano T., Nakamoto T., Inui H., Yamaguchi M. Intermetallics. 4:1996;S119-31.
6. Reader A.H., van Ommen A.H., Weijs P.J.W., Wolters R.A.M., Oostra D.J. Rep. Prog. Phys. 56:1992;1397-1467.
7. Harper J.M.E., Rodbell K.P. J. Vac. Sci. Technol. B 15:1997;763-779.
8. Perio A., Torres J., Bomchil G., d'Avitaya F.A., Pantel R. Appl. Phys. Lett. 45:1984;857-859.
9. Cheng J.Y., Cheng H.C., Chen L.J. J. Appl. Phys. 61:1987;2218-2223.
10. Loopstra O.B., Sloof W.G., Dekeijser T.H., Mittemeijer E.J., Radelaar S., Kuiper A.E.T., Wolters R.A.M. J. Appl. Phys. 63:1988;4960-4969.
11. Murarka S.P., Fraser D.B., Rretajczyk T.F., Sheng T.T. J. Appl. Phys. 51:1980;5380-5385.
12. Bretschneider G., Beddies G. Thin Solid Films. 149:1987;61-64.
13. Chou T.C., Nieh T.G. Thin Solid Films. 214:1992;48-57.
14. Nakajima H., Fujimori H., Koiwa M. J. Appl. Phys. 63:1988;1046-1051.
15. Jiang Z., Jiang X., Liu W., Wu Z. J. Appl. Phys. 65:1989;196-200.
16. Johnson C.D., Anderson K., Gromko D., Johnson D.C. J. Am. Chem. Soc. 120:1998;5226-5232.
17. de Vries J.W.C., van Ommen A.H. J. Appl. Phys. 64:1988;749-752.
18. van Ommen A.H., Reader A.H., de Vries J.W.C. J. Appl. Phys. 64:1988;3574-3580.
19. Boettinger W.J., Perepezko J.H., Frankwicz P.S. Mater. Sci. Eng. A155:1992;33-44.
20. Naidu S.V.N., Mays C.F., Houska C.R. J. Am. Ceram. Soc. 65:1982;C58-59.
21. Wang XY, Chang ITH, Aindow M. Submitted to Philos Mag Lett.
22. Mitchell T.E., Castro R.G., Chadwick M.M. Philos. Mag A. 65:1992;1339-1351.
23. Zallen R. The physics of amorphous solids. 1983;John Wiley & Sons, New York.
24. Guivarc'h A., Auvray P., Berthou L., le Cun M., Boulet J.P., Henoc P., Pelous G. J. Appl. Phys. 49:1978;233-237.
25. Doland C.M., Nemanich R.J. J. Mater. Res. 5:1990;2854-2864.
26. Gaffet E., Malhouroux-Gaffet N. J. Alloys Comp. 205:1994;27-34.
27. Massalski T.B. Metall. Trans. A15:1984;421-425.
28. Ma Z., Allen L.H., Allman D.D.J. J. Appl. Phys. 77:1995;4384-4388.
29. Tanaka H., Hirashita N., Sinclair R. Jpn. J. Appl. Phys. 37:1998;4284-4287.
30. Yamaguchi M, Inui H, Shirai Y. In: Yoo MH, Wutting M, editors. Twinning in advanced materials, Warrendale (PA): Minerals, Metals and Materials Society; 1994. p. 177-89.
31. Jin S., Aindow M., Zhang Z., Chen L.J. J. Mater. Res. 10:1995;891-899.
32. Massalski T.B. Phase transformations. 1970. Chapman and Hall, London. p. 547.