Thermoelectric microsensor for pressure and gas concentration measurement

Materials Science and Engineering: B

Volumn 95, Issue 3, 2002, Pages 268-274

  Giani, Alain ^a   Al Bayaz, Asmail ^a   Boulouz, Abdel ^a   Pascal Delannoy, Frédérique ^a   Foucaran, Alain ^a   Boyer, André ^a  

^a UNIVERSITÉ MONTPELLIER II   (France)

Author keywords

Gas sensor; Metal organic chemical vapour deposition; Pressure sensor; Seebeck effect

Indexed keywords

CHEMICAL SENSORS; ENERGY GAP; HEAT TRANSFER; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSENSORS; PRESSURE EFFECTS; SEEBECK EFFECT; THERMOCOUPLES; THERMOELECTRIC ENERGY CONVERSION; THERMOELECTRICITY; THIN FILMS;

THERMOELECTRIC DEVICES;

SEMICONDUCTING BISMUTH COMPOUNDS;

EID: 0036723375     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00265-9     Document Type: Article

References (26)

1. Technical digest of the fourth international meeting on chemical sensors (Tokyo)