A miniaturized levitation system with motion control using a piezoelectric actuator

IEEE Transactions on Control Systems Technology

Volumn 10, Issue 5, 2002, Pages 666-670

  Morita, Takeshi ^a,b,c   Shimizu, Katsumi ^d   Hasegawa, Masayuki ^e   Oka, Koichi ^f   Higuchi, Toshiro ^a,d  

^a IEEE   (Japan)

^b INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^c TOHOKU UNIVERSITY   (Japan)

^d UNIVERSITY OF TOKYO   (Japan)

^e FUJITSU LABORATORIES LTD   (Japan)

^f KOCHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Feedback; Levitation; Microactuator; Motion control; Piezoelectric devices

Indexed keywords

GRAVITY FORCE; INTERMOLECULAR FORCES; LINEAR ACTUATOR; MAGNETIC FORCE; MICROLEVITATION SYSTEM; MICROMANIPULATION SYSTEM; PIEZOELECTRIC ACTUATOR;

DEGREES OF FREEDOM (MECHANICS); ELECTROSTATICS; FEEDBACK CONTROL; FORCE CONTROL; MICROACTUATORS; PERMANENT MAGNETS; PIEZOELECTRIC DEVICES;

MOTION CONTROL;

EID: 0036714927     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2002.801802     Document Type: Article

References (11)

1. IC-processed electrostatic micromotors
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6. Active micro motor bearings
7. Development of a millimeter-sized active magnetic bearing systems
8. Magnetic levitation system by reluctance control
9. A three-degrees-of-freedom mag-lev system with actuators and permanent magnet
10. Hanging type mag-lev system with permanent magnet motion control