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Volumn 17, Issue 9, 2002, Pages 931-937
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Effects of precursor concentration on the optical and electrical properties of SnxSy thin films prepared by plasma-enhanced chemical vapour deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC CONDUCTIVITY;
HETEROJUNCTIONS;
OPACITY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
POLYCRYSTALLINE MATERIALS;
SEMICONDUCTING TIN COMPOUNDS;
PRECURSOR CONCENTRATION;
THIN FILMS;
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EID: 0036714375
PISSN: 02681242
EISSN: None
Source Type: Journal
DOI: 10.1088/0268-1242/17/9/305 Document Type: Article |
Times cited : (93)
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References (30)
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