Low-loss deep glass waveguides produced with dry silver electromigration process

Journal of Lightwave Technology

Volumn 20, Issue 8, 2002, Pages 1590-1597

  Chuang, Ricky W ^a   Lee, Chin C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Channel waveguides; Electromigration; Energy dispersive X ray (EDX) spectroscopy; Ion exchange; Scanning electron microscopy (SEM); Silver

Indexed keywords

ELECTROMIGRATION; ENERGY DISPERSIVE SPECTROSCOPY; OPTICAL DESIGN; OPTICAL WAVEGUIDES; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE; SILVER;

CHANNEL WAVEGUIDES; GLASS SUBSTRATES;

OPTICAL GLASS;

EID: 0036705247     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2002.800337     Document Type: Article

References (12)

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