Electron energy-loss spectroscopy of carbon films prepared by electron-cyclotron-resonance plasma sputtering

Materials Transactions

Volumn 43, Issue 8, 2002, Pages 2092-2096

  Murooka, Yoshie ^a   Tanaka, Nobuo ^a   Hirono, Shigeru ^a   Hibino, Michio ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Atomic structure; Conductive hard carbon film; Electron energy loss spectroscopy; Electron cyclotron resonance sputtering; Sp2 fraction

Indexed keywords

BAND STRUCTURE; CARBON; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; ELECTRON CYCLOTRON RESONANCE; ELECTRON ENERGY LOSS SPECTROSCOPY; GRAPHITIZATION; PLASMA APPLICATIONS; SODIUM CHLORIDE; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY; WEAR OF MATERIALS;

PLASMA SPUTTERING;

CONDUCTIVE FILMS;

EID: 0036699695     PISSN: 13459678     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans.43.2092     Document Type: Article

References (12)

1. S. Umemura, Y. Andoh, S. Hirono, T. Miyamoto and R. Kaneko: Philos. Mag. A 74 (1996) 1143-1157.
2. S. Hirono, S. Umemura, M. Tomita and R. Kaneko: Appl. Phys. Lett. 80 (2002) 425-427.
3. R.F. Egerton: Electron energy-loss spectroscopy in the electron microscope 2nd ed., (Plenum Press, New York, 1996) pp. 154-165.
4. S.D. Berger, D.R. McKenzie and P.J. Martin: Philos. Mag. Lett. 57 (1988) 285-290.
5. S. Hirono, S. Umemura, Y. Andoh, T. Hayashi and R. Kaneko: IEEE Trans. Magn. 34 (1998) 1729-1731.
6. J. Fink, T. Mueller-Heinzerling, J. Pflueger, A. Bubenzer, P. Koidl and G. Crecelius: Solid State Comm. 47 (1983) 687-691.
7. L.B. Leder and J.A. Suddeth: J. Appl. Phys. 31 (1960) 1422-1426.
8. Y.H. Ichikawa: Phys. Rev. 109 (1958) 653-657.
9. J. Fink: Adv. Electr. Electron Phys. 75 (1989) 121-232.
10. P.J. Fallon, V.S. Veerasamy, C.A. Davis, J. Robertson, G.A.J. Amaratunga, W.I. Milne and J. Koskinen: Phys. Rev. B 48 (1993) 4777-4782.
11. J. Bruley, D.B. Williams, J.J. Cuomo and D.P. Pappas: J. Microsc. 180 (1995) 22-32.
12. M.T. Yin and M.L. Cohen: Phys. Rev. B 29(1984) 6996-6998.