Is XPS combined with argon ion sputtering pertinent for depth profiling molybdenum-implanted stainless-steel layers?

Surface and Interface Analysis

Volumn 34, Issue 1, 2002, Pages 276-279

  Mottu, N ^a   Vayer, M ^a   Benoit, R ^a   Erre, R ^a  

^a Centre National de la Recherche Scientifique   (France)

Author keywords

Austenitic stainless steel; Mo ion implantation; Preferential sputtering; XPS depth profiling

Indexed keywords

AMORPHIZATION; ARGON; CALCULATIONS; CARBON; COMPUTER SIMULATION; CRYSTAL STRUCTURE; DIFFUSION; ION BOMBARDMENT; ION IMPLANTATION; MOLYBDENUM; RUTHERFORD BACKSCATTERING SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

ARGON ION SPUTTERING; DEPTH PROFILING; IMPLANTED LAYER; PREFERENTIAL SPUTTERING;

STAINLESS STEEL;

EID: 0036693484     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1299     Document Type: Conference Paper

References (14)