How to measure accurately mass transport in thin films by AES

Surface and Interface Analysis

Volumn 34, Issue 1, 2002, Pages 389-392

  Girardeaux, C ^a   Clugnet, G ^a   Erdelyi Z ^a,b   Nyeki J ^a,b   Bernardini, J ^a   Beke, D ^b   Rolland, A ^a  

^a AIX MARSEILLE UNIVERSITÉ   (France)

^b UNIVERSITY OF DEBRECEN   (Hungary)

Author keywords

AES; Mass transport; Thin films

Indexed keywords

DIFFUSION; DISSOLUTION; ELECTRON TRANSPORT PROPERTIES; GRAIN BOUNDARIES; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; NUMERICAL METHODS; REACTION KINETICS; SURFACE STRUCTURE; SURFACE TREATMENT; THIN FILMS;

KINETIC DETERMINISTIC EQUATION; MASS TRANSPORT; NANOCRYSTALLINE FILM; SURFACE SEGREGATION KINETIC;

AUGER ELECTRON SPECTROSCOPY;

EID: 0036692789     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1323     Document Type: Conference Paper

References (13)