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Volumn 149, Issue 8, 2002, Pages
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Selective electrodeposition of Cu nanostructures on focused ion beam sensitized p-Si
a b b c
a
EPFL
(Switzerland)
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Author keywords
[No Author keywords available]
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Indexed keywords
COPPER;
CRYSTAL DEFECTS;
ELECTROCHEMISTRY;
GALLIUM;
ION BEAMS;
ION IMPLANTATION;
MORPHOLOGY;
NANOSTRUCTURED MATERIALS;
POLARIZATION;
SILICON WAFERS;
DEIONIZED WATER;
FOCUSED ION BEAM;
ION FLUENCES;
SELECTIVE ELECTROCHEMICAL REACTION;
ELECTRODEPOSITION;
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EID: 0036688329
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1490538 Document Type: Article |
Times cited : (18)
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References (44)
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