A high-resolution mixed field immersion lens attachment for conventional scanning electron microscopes

Review of Scientific Instruments

Volumn 73, Issue 8, 2002, Pages 2906-

  Khursheed, A ^a   Karuppiah, N ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036684907     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1488681     Document Type: Article

References (0)