Direct numerical inversion method for kinetic ellipsometric data. I. Presentation of the method and numerical evaluation

Applied Optics

Volumn 41, Issue 22, 2002, Pages 4510-4518

  Kouznetsov, Dmitri ^a   Hofrichter, Alfred ^a,b   Drévillon, Bernard ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b Saint Gobain Glass Deutschland GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; MATRIX ALGEBRA; OPTICAL FILMS; PERMITTIVITY; POLARIMETERS; POLYNOMIALS; REAL TIME SYSTEMS; SPECTROSCOPIC ANALYSIS; THIN FILMS;

ABELES MATRICES;

REFRACTIVE INDEX;

EID: 0036684524     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.004510     Document Type: Article

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