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Volumn 372-376, Issue PART 2, 2002, Pages 1221-1224
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Comparison of plasma sprayed and flame sprayed YBa2Cu3O7-x targets for rotatable magnetron sputtering
c
Bekaert sa
(Belgium)
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Author keywords
Flame spraying; Plasma spraying; Rotatable magnetron sputter targets; YBa2Cu3O7 x
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Indexed keywords
DEPOSITION;
FLAME SPRAYING;
MAGNETRON SPUTTERING;
MECHANICAL PROPERTIES;
MICROSTRUCTURE;
PLASMA SPRAYING;
STAINLESS STEEL;
SUBSTRATES;
TARGETS;
THERMODYNAMIC PROPERTIES;
ROTATABLE MAGNETRON SPUTTER TARGETS;
YTTRIUM BARIUM COPPER OXIDES;
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EID: 0036682692
PISSN: 09214534
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-4534(02)00977-2 Document Type: Article |
Times cited : (12)
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References (9)
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