Electron energy deposition in an electron-beam pumped KrF amplifier: Impact of the gas composition

Journal of Applied Physics

Volumn 92, Issue 3, 2002, Pages 1200-1206

  Giuliani, J L ^a   Petrov, G M ^b   Dasgupta, A ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b Berkeley Research Associates   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATTACHMENT RATE; COLLISION RATE; ELECTRON BEAM POWER; ELECTRON DEPOSITION; ELECTRON ENERGIES; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ELECTRON-ION PAIR; FITTING FORMULA; GAS COMPOSITIONS; IONIZATION RATES; KRF LASERS; LOW ENERGIES; MEAN ENERGY; MOLE FRACTION; RATE COEFFICIENTS; TOTAL POWER DISSIPATION;

ATMOSPHERIC PRESSURE; CARRIER CONCENTRATION; DISSOCIATION; ELECTRON BEAMS; ELECTRON DENSITY MEASUREMENT; FLUORINE; IONIZATION OF GASES;

KRYPTON;

EID: 0036679110     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1491592     Document Type: Article

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