Effects of ceramic-film thickness on humidity sensitivity of Al/Ba1-xLaxNbyTi1-yO3/SiO 2/Si structure

Smart Materials and Structures

Volumn 11, Issue 4, 2002, Pages 504-508

  Li, B ^a   Lai, P T ^b   Li, G Q ^a   Zeng, S H ^a   Huang, M Q ^a  

^a SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; CAPACITORS; MOISTURE DETERMINATION; POROSITY; SILICA; SILICON; THICKNESS MEASUREMENT; VOLUME FRACTION;

BARIUM LANTHANUM NIOBIUM TITANATE; METAL INSULATOR SEMICONDUCTOR CAPACITORS; PORE VOLUME DISTRIBUTION;

BARIUM COMPOUNDS;

EID: 0036672322     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/11/4/304     Document Type: Article

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