SCOPUS 정보 검색 플랫폼

Volumn 11, Issue 3, 2002, Pages 333-337

Spectroscopic investigation of vacuum-arc anode plasmas for thin film deposition

c SODERN (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; CARRIER CONCENTRATION; CHARGE COUPLED DEVICES; ELECTRIC CURRENTS; ELECTRONS; INFRARED SPECTROSCOPY; TEMPERATURE;

ELECTRON TEMPERATURE; LOCAL THERMAL EQUILIBRIUM; PLASMA STREAMING; THIN FILM DEPOSITION; VACUUM-ARC ANODE PLASMA;

PLASMA SOURCES;

EID: 0036671343 PISSN: 09630252 EISSN: None Source Type: Journal
DOI: 10.1088/0963-0252/11/3/316 Document Type: Article

Times cited : (8)

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