|
Volumn 11, Issue 3, 2002, Pages 279-282
|
The effect of including the ion flux issuing from the core of an electronegative plasma on the electron temperature versus pressure characteristic
|
Author keywords
[No Author keywords available]
|
Indexed keywords
CHLORINE;
DIFFUSION IN GASES;
ELECTRONS;
IONS;
PLASMA SOURCES;
TEMPERATURE;
ELECTRON TEMPERATURE;
ELECTRONEGATIVE PLASMA;
ION FLUX;
PLASMA COLLISION PROCESSES;
|
EID: 0036670671
PISSN: 09630252
EISSN: None
Source Type: Journal
DOI: 10.1088/0963-0252/11/3/309 Document Type: Article |
Times cited : (4)
|
References (23)
|